Title :
An Analysis of Material Choices for Capacitive Microaccelerometers
Author :
Kushnir, Yuri ; Teslyuk, Vasyl ; Turchenko, P.
Author_Institution :
Lviv Polytech. Nat. Univ., Lviv
Abstract :
In this paper, microaccelerometer sensitivity upon material admixtures has been considered. The ANSYS aided analysis allows proclamation of tuning possibilities for accelerometer development on stages before manufacturing.
Keywords :
CAD; accelerometers; capacitive sensors; micromechanical devices; microsensors; stress analysis; ANSYS aided analysis; CAD systems; MEMS; capacitive microaccelerometers; material admixtures variation; material deformation; stress analysis; Accelerometers; CADCAM; Capacitance; Computer aided manufacturing; Gravity; Microelectromechanical systems; Micromechanical devices; Silicon carbide; Stress; Testing; CAD; MEMS; accelerometer; material;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-553-614-7
DOI :
10.1109/MEMSTECH.2007.4283414
