Title :
Methodology of the Automated MEMS Design
Author :
Teslyuk, Vasyl ; Lobur, Mykhaylo ; Denysyuk, Pavlo ; Kolesnyk, Konstantin
Abstract :
In this paper, the automated MEMS design at system level is offered which is based on the generation of large number of alternative decisions on the basis of a developed AND-OR - tree, the method of alternative decision quantity decrease and multicriterion optimization task quantity decrease.
Keywords :
electronic design automation; micromechanical devices; AND-OR-tree; alternative decision; automated MEMS design; multicriterion optimization task quantity; Acceleration; Additives; Capacitive sensors; Casting; Design methodology; Design optimization; Manufacturing; Microactuators; Micromechanical devices; Microsensors; MEMS; alternative MEMS structure determination; design; methodology;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-553-614-7
DOI :
10.1109/MEMSTECH.2007.4283431
