Title :
Network microresonator: modeling and simulations
Author :
Sviridova, T. ; Sviridova, L.
Author_Institution :
Lviv Polytech. Nat. Univ., Lviv
Abstract :
In this paper mathematical model of network micro resonator is presented, dependencies of output characteristics to length of connecting beam are carried out.
Keywords :
embedded systems; microactuators; micromechanical resonators; connecting beam length; embedded systems; microactuators; network microresonator; Band pass filters; Joining processes; Mathematical model; Microcavities; Micromechanical devices; Resonant frequency; Resonator filters; Space technology; Structural beams; Vibrations; MEMS; beam; microresonator; network;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-553-614-7
DOI :
10.1109/MEMSTECH.2007.4283436
