DocumentCode
3181465
Title
Research of Influence of Materials Properties on Resonance Frequencies of Micromechanical Tuning Fork Gyroscope
Author
Lobur, Mykhaylo ; Holovatyy, Andriy
Author_Institution
Lviv Polytech. Nat. Univ, Lviv
fYear
2007
fDate
23-26 May 2007
Firstpage
115
Lastpage
116
Abstract
In this paper the influence of materials properties on resonance frequencies is researched. It is shown how resonance drive and sense frequencies depend on material property.
Keywords
gyroscopes; materials properties; microsensors; vibrations; MEMS; inertial sensors; materials properties; micromechanical tuning fork gyroscope; resonance frequencies; Force sensors; Gyroscopes; Iron; Material properties; Microelectromechanical systems; Micromechanical devices; Resonance; Resonant frequency; Structural beams; Vibrations; Coriolis force; MEMS (MicroElectroMechanical Systems) technologies; angular rate; inertial sensors; tuning fork comb-drive gyroscope;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
Conference_Location
Lviv-Polyana
Print_ISBN
978-966-553-614-7
Type
conf
DOI
10.1109/MEMSTECH.2007.4283440
Filename
4283440
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