DocumentCode
3181484
Title
0.06 μm gate length metamorphic In0.52Al0.48 As/In0.53Ga0.47As HEMTs on GaAs with high f T and fMAX
Author
Bollaert, S. ; Cordier, Y. ; Zaknoune, M. ; Happy, H. ; Lepilliet, S. ; Cappy, A.
Author_Institution
Dept. Hyperfrequences et Semicond., Inst. d´´Electron. et de Microelectron. du Nord, Villeneuve d´´Ascq, France
fYear
2001
fDate
2001
Firstpage
192
Lastpage
195
Abstract
State-of-the art metamorphic In0.52Al0.48As/In0.53Ga0.47 As HEMTs on a GaAs substrate with 60 nanometer gate length is reported. The DC and microwave performance were investigated. Typical drain-to-source current Ids of 600 mA/mm and extrinsic transconductance of 850 mS/mm were obtained with our devices. Cutoff frequency fT and maximum oscillation frequency fmax are 260 GHz and 490 GHz respectively. To our knowledge, these frequency performances are the highest ever reported for HEMTs on GaAs substrate
Keywords
III-V semiconductors; aluminium compounds; gallium arsenide; high electron mobility transistors; indium compounds; DC performance; GaAs; GaAs substrate; In0.52Al0.48As-In0.53Ga0.47 As; cutoff frequency; drain-to-source current; extrinsic transconductance; metamorphic HEMT; microwave performance; oscillation frequency; Buffer layers; Gallium arsenide; HEMTs; Indium compounds; Lattices; MODFETs; Silicon; Strain measurement; Substrates; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 2001. IPRM. IEEE International Conference On
Conference_Location
Nara
ISSN
1092-8669
Print_ISBN
0-7803-6700-6
Type
conf
DOI
10.1109/ICIPRM.2001.929090
Filename
929090
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