Title :
The Hummingbird minipositioner-providing three-axis motion at 50 g´s with low reactions
Author :
Karidis, J.P. ; McVicker, G. ; Pawletko, J.P. ; Zai, L.C. ; Goldowsky, M. ; Brown, R.E. ; Comulada, R.R.
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
Abstract :
The Hummingbird minipositioner is a three-axis servo-mechanism designed to provide fast and accurate positioning of a low-mass probe tip on or above a nearly planar object. Peak XYZ accelerations in excess of 500 m/s2 (50 g) are obtained, with positioning resolution under 1 μm and a workspace of 13 by 13 by 1 mm. The system weighs 950 g and is nearly reactionless during X-Y motion to simplify integration with large-area positioners. The design of the dynamically balanced five-bar linkage assembly and the Z-actuator is presented, along with data on in-plane linkage resonances (shown to be >1 kHz) and the torque cancellation effectiveness. A typical incremental move of 5 mm with 50 g peak acceleration and a move time of 8 ms is also presented
Keywords :
micromechanical devices; robots; servomechanisms; 0.950 kg; 1 mm; 13 mm; Hummingbird minipositioner; Z-actuator; acceleration 500 m/s2; dynamically balanced five-bar linkage assembly; in-plane linkage resonances; nearly planar positioning; three-axis motion; Acceleration; Actuators; Assembly; Couplings; Electronic components; Payloads; Probes; Resonance; Torque; Vibrations;
Conference_Titel :
Robotics and Automation, 1992. Proceedings., 1992 IEEE International Conference on
Conference_Location :
Nice
Print_ISBN :
0-8186-2720-4
DOI :
10.1109/ROBOT.1992.220288
