Title :
InP 2D nano-structures fabricated by two-time laser holography
Author :
Ohira, T. ; Segawa, T. ; Nagai, K. ; Takahashi, S. ; Utaka, K. ; Nakao, M.
Author_Institution :
Dept. of Electron., Inf. & Commun. Eng., Waseda Univ., Tokyo, Japan
Abstract :
We have fabricated two-dimensional nano-structures on (100)-InP substrates using two-time laser holography and subsequent wet and/or dry etching. Triangular and square lattice patterns with a period of 500 nm have been successfully fabricated over a large area of the substrates. We have also measured the reflectivity of the samples
Keywords :
III-V semiconductors; etching; holography; indium compounds; infrared spectra; laser materials processing; nanotechnology; optical fabrication; periodic structures; photonic band gap; reflectivity; sputter etching; (100)-InP substrates; 500 nm; InP; InP 2D nano-structures; InP-InGaAsP; dry etching; periodic structure; photonic crystals; reflectivity; square lattice patterns; triangular lattice patterns; two-dimensional nano-structures; two-time laser holography; wet etching; Holography; Indium phosphide; Lattices; Optical filters; Optical materials; Optical resonators; Optical surface waves; Reflectivity; Resists; Substrates;
Conference_Titel :
Indium Phosphide and Related Materials, 2001. IPRM. IEEE International Conference On
Conference_Location :
Nara
Print_ISBN :
0-7803-6700-6
DOI :
10.1109/ICIPRM.2001.929109
