Voxel-Based Modeling and Rendering for Virtual MEMS Fabrication Process

This paper puts forward a novel approach based on voxel-based modeling and volume rendering to virtual MEMS fabrication process simulation. Voxel-based modeling with 3D mathematical morphology and expert system can produce realistic representation of complex MEMS device and is really stable, robust, and accurate compared to the traditional solid modeling. Additionally, volume rendering technique enables the user to fully visualize the internal structure of 3D geometry. A voxel-based modeling and visualization prototyping for virtual MEMS fabrication process, called ZProcess, has been successfully developed. The capabilities of ZProcess are validated for various fabrication processes and device design