Submicrometer waveguide for nano-optics

With the recent progress within the field of processing nano structures, there is an increasing interest in coupling light into such structures both for characterization of optical properties and new optical components. In this work we propose the use of a sub-micrometer planar waveguide for probing the reflection of light against a nano structure. The planar waveguide is based on a silicon nitride core layer, surrounded by a silica cladding region. In our design we utilize this waveguide to couple light into a nano-structure.