Modeling and Compensating of Piezoelectric Actuator Hysteresis in Photolithography

Author

Zhan-Hui, Li ; Yun-Xin, Wu ; Xi-Shu, Deng

Author_Institution

Sch. of Mech. & Electr. Eng., Central South Univ., Changsha

fYear

2007

fDate

26-28 June 2007

Firstpage

1

Lastpage

3

Abstract

Piezoelectric materials have many advantages, such as: high stiffness, a high frequency response, and high resolution. It has been widely used in reducing vibration system, but hysteresis confines its use. This paper establish model of piezoelectric material´s hysteresis at different turning point according to comparability of hysteresis curve. The simulation result´s error less than 2 percent contrast to testing data. Piezoelectric materials´ output is linear against input controlling by the model.

Keywords

compensation; dielectric hysteresis; photolithography; piezoelectric actuators; piezoelectric materials; vibration control; hysteresis modeling; hysteresis turning point; photolithography; piezoelectric actuator hysteresis compensation; piezoelectric materials; vibration reduction; Frequency response; Hysteresis; Lithography; Piezoelectric actuators; Piezoelectric materials; Strain measurement; Testing; Turning; Vibrations; Voltage; Piezoelectric material; actuator; compensate; hysteresis;

fLanguage

English

Publisher

ieee

Conference_Titel

High Density packaging and Microsystem Integration, 2007. HDP '07. International Symposium on

Conference_Location

Shanghai

Print_ISBN

1-4244-1252-8

Electronic_ISBN

1-4244-1253-6

Type

conf

DOI

10.1109/HDP.2007.4283614

Filename

4283614