Title :
Mass-transport Fabrication Of Efficient Microlenses, Mirrors, Gratings And Monolithic Integrated Diode Lasers
Author_Institution :
Massachusetts Institute of Technology
fDate :
29 Jul-2 Aug 1991
Keywords :
Fabrication; Gratings; Indium phosphide; Lenses; Microoptics; Mirrors; Optical refraction; Optical surface waves; Semiconductor laser arrays; Substrates;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.639014