Analytical Model of the Electrostatic Scratch Drive Actuator

Author

Maohua, Yu ; Xiaojing, Wang ; Mingchun, Xie ; Guoliang, Wang ; Minliang, Zhang

Author_Institution

Sch. of Mechatron. & Autom., Shanghai Univ., Shanghai

fYear

2007

fDate

26-28 June 2007

Firstpage

1

Lastpage

4

Abstract

In the field of micro-electro-mechanical system actuator, the scratch drive actuator (SDA) is the one, which can realize long distance travel with precise nanometer step sizes. In this paper, a newly revisory analytical model of the scratch drive actuator including the effects of the MEMS surface - micromachining processing parameter and the counterforce of the support arms is proposed. The performance of the SDA is analyzed, such as the critical voltage, the step size and the total displacement. The good agreement between the simulation results and the experimental data is obtained.

Keywords

electrostatic actuators; micromachining; surface treatment; MEMS surface; electrostatic scratch drive actuator; microelectro-mechanical system actuator; micromachining; revisory analytical model; Analytical models; Arm; Drives; Electrodes; Electrostatic actuators; Insulation; Insulators; Integrated circuit technology; Microelectromechanical systems; Micromechanical devices; MEMS; analytical model; scratch drive actuator; surface micromachining processing;

fLanguage

English

Publisher

ieee

Conference_Titel

High Density packaging and Microsystem Integration, 2007. HDP '07. International Symposium on

Conference_Location

Shanghai

Print_ISBN

1-4244-1252-8

Electronic_ISBN

1-4244-1253-6

Type

conf

DOI

10.1109/HDP.2007.4283653

Filename

4283653