Analysis of the Air Damping in MEMS Lateral Driven Microresonators

Author

Mingchun, Xie ; Xiaojing, Wang ; Maohua, Yu ; Minliang, Zhang ; Guoliang, Wang

Author_Institution

Sch. of Mechatron. & Autom., Shanghai Univ., Shanghai

fYear

2007

fDate

26-28 June 2007

Firstpage

1

Lastpage

4

Abstract

Air damping has significant effect on the performance of MEMS structures. A numerical method has been brought out by authors to calculate the effect of air damping force in the lateral oscillating microresonator with a revised Reynolds Equation, but it is too complex for MEMS design. In the present paper, a new simple analysis of the air damping is proposed, which considers slip effect and gas rarefaction effect. A simulation of the microresonator is performed by FEM (finite element method) software, ANSYS, includes model establishment, modal analysis and amplitude-frequency analysis which depend on "spring-mass-dashpot" dynamic model. Considering air damping, the analysis results with this method show that have good agreement with the experimental data.

Keywords

damping; finite element analysis; micromechanical resonators; modal analysis; FEM software; MEMS design; MEMS lateral driven microresonators; Reynolds equation; air damping; amplitude-frequency analysis; finite element method; gas rarefaction effect; modal analysis; numerical method; slip effect; spring-mass-dashpot dynamic model; Analytical models; Damping; Effective mass; Equations; Finite element methods; Microcavities; Micromechanical devices; Modal analysis; Performance analysis; Resonant frequency; ANSYS; MEMS; air damping; microresonator;

fLanguage

English

Publisher

ieee

Conference_Titel

High Density packaging and Microsystem Integration, 2007. HDP '07. International Symposium on

Conference_Location

Shanghai

Print_ISBN

1-4244-1252-8

Electronic_ISBN

1-4244-1253-6

Type

conf

DOI

10.1109/HDP.2007.4283654

Filename

4283654