Dry Etching Of Materials Other Than Silicon

Author

Welch, Colin C.

Author_Institution

Surface Technology Systems Ltd, Prince of Wales Industrial Estate, Abercarn

fYear

1997

fDate

35544

Firstpage

42552

Lastpage

42554

fLanguage

English

Publisher

iet

Conference_Titel

Extremely Hard Materials for Micromechanics (Digest No: 1997/059), IEE Colloquium on

Conference_Location

IET

Type

Filename

640870

Link To Document