مرکز منطقه ای اطلاع رساني علوم و فناوري - Dry Etching Of Materials Other Than Silicon

DocumentCode :

318489

Title :

Dry Etching Of Materials Other Than Silicon

Author :

Welch, Colin C.

Author_Institution :

Surface Technology Systems Ltd, Prince of Wales Industrial Estate, Abercarn

fYear :

1997

fDate :

35544

Firstpage :

42552

Lastpage :

42554

fLanguage :

English

Publisher :

iet

Conference_Titel :

Extremely Hard Materials for Micromechanics (Digest No: 1997/059), IEE Colloquium on

Conference_Location :

IET

Type :

conf

Filename :

640870

Link To Document :