Title :
IEE Microengineering Technologies and How to Exploit Them (Ref. 1997/076)
Abstract :
The following topics were dealt with: micromachining; LIGA processes; focused ion beams in microscale fabrication; anode manufacture for magnetrons; polymer micromoulding technologies; photochemical machining and electroforming
Keywords :
micromachining; LIGA processes; anode manufacture; electroforming; focused ion beams; magnetrons; microengineering technologies; micromachining; microscale fabrication; photochemical machining; polymer micromoulding technologies;
Conference_Titel :
Microengineering Technologies and How to Exploit Them (Digest No: 1997/076), IEE Colloquium on
Conference_Location :
Birmingham
