Resonant sensors for high accuracy pressure measurement using silicon technology

A resonant element transducer has been developed for aerospace applications using micromachined silicon technology. The sensor is a beam supported over a square diaphragm. The resonant frequency of the beam is proportional to the applied pressure on the diaphragm. The authors describe the process of sensor construction, report on its physical characteristics, and summarize the performance evaluations which have been conducted to determine resonance frequency quality factor, temperature coefficient, and temperature and pressure hysteresis