Title :
A 2 MHz, 2 kW voltage-source inverter for low-temperature plasma generators: implementation of fast switching with a third-order resonant circuit
Author :
Fujita, Hideaki ; Akagi, Hirofumi
Author_Institution :
Okayama Univ., Japan
Abstract :
This paper presents a specially designed third-order resonant circuit intended to achieve fast switching operation for a voltage-source series-resonant inverter using four MOSFETs. The third-order resonant current superimposed on a sinusoidal load current helps to quickly charge or discharge the output capacitance of each MOSFET. This results not only in a reduction of the time required to turn the MOSFET on and off, but also in an improvement of the displacement factor of the inverter. Moreover, the third-order resonant circuit acts as a low-pass filter to eliminate the parasitic oscillation between line inductance and stray capacitance. The viability and effectiveness of the third-order resonant circuit is verified by a 2 MHz, 2 kW prototype inverter developed for a low-temperature plasma generator
Keywords :
DC-AC power convertors; field effect transistor switches; invertors; plasma production; power MOSFET; power field effect transistors; power semiconductor switches; power supplies to apparatus; resonant power convertors; switching circuits; 2 MHz; 2 kW; displacement factor; fast switching implementation; line inductance; low-pass filter; low-temperature plasma generators; parasitic oscillation elimination; power MOSFET switches; series-resonant inverter; stray capacitance; third-order resonant circuit; voltage-source inverter; Inductance; Inverters; Low pass filters; MOSFETs; Parasitic capacitance; Plasmas; RLC circuits; Resonance; Switching circuits; Voltage;
Conference_Titel :
Industry Applications Conference, 1997. Thirty-Second IAS Annual Meeting, IAS '97., Conference Record of the 1997 IEEE
Conference_Location :
New Orleans, LA
Print_ISBN :
0-7803-4067-1
DOI :
10.1109/IAS.1997.629071
