Title :
IEE Colloquium on Silicon Fabricated Inertial Instruments (Ref. No.1996/227)
Abstract :
The following topics were dealt with: small micro inertial sensors; monolithic Si gyroscope with simultaneous three-axis sensing; micromachined tuning fork gyroscope; micromachined rotating gyroscope; membrane gyroscope with electrostatic actuation; bulk micromachined capacitative force feedback accelerometer; polysilicon accelerometer; thin film piezoelectric layers for sensing and actuation in microstructures; SOI material for sensors and accelerometers
Keywords :
silicon; SOI material; Si; bulk micromachined; capacitative force feedback accelerometer; electrostatic actuation; inertial instruments; membrane gyroscope; micromachined rotating gyroscope; micromachined tuning fork gyroscope; microstructures actuation; monolithic gyroscope; polysilicon accelerometer; simultaneous three-axis sensing; small micro inertial sensors; thin film piezoelectric layers;
Conference_Titel :
Silicon Fabricated Inertial Instruments (Digest No: 1996/227), IEE Colloquium on
Conference_Location :
London
