DocumentCode
3187265
Title
CNT based nano electro mechanical systems (NEMS)
Author
Hierold, C. ; Stampfer, C. ; Helbling, T. ; Jungen, A. ; Tripp, M. ; Sarangi, D.
Author_Institution
Dept. of Micro & Nanosyst., ETH Zurich, Switzerland
fYear
2005
fDate
7-9 Nov. 2005
Firstpage
1
Lastpage
4
Abstract
The paper reports on the development of carbon nanotube based nano electromechanical sensors.
Keywords
carbon nanotubes; microsensors; nanotechnology; carbon nanotube; electromechanical sensors; nanoelectromechanical systems; Biosensors; Carbon nanotubes; Mechanical factors; Mechanical sensors; Mechanical systems; Nanobioscience; Nanoelectromechanical systems; Semiconductivity; Sensor systems; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on
Print_ISBN
0-7803-9482-8
Type
conf
DOI
10.1109/MHS.2005.1589954
Filename
1589954
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