Title :
CNT based nano electro mechanical systems (NEMS)
Author :
Hierold, C. ; Stampfer, C. ; Helbling, T. ; Jungen, A. ; Tripp, M. ; Sarangi, D.
Author_Institution :
Dept. of Micro & Nanosyst., ETH Zurich, Switzerland
Abstract :
The paper reports on the development of carbon nanotube based nano electromechanical sensors.
Keywords :
carbon nanotubes; microsensors; nanotechnology; carbon nanotube; electromechanical sensors; nanoelectromechanical systems; Biosensors; Carbon nanotubes; Mechanical factors; Mechanical sensors; Mechanical systems; Nanobioscience; Nanoelectromechanical systems; Semiconductivity; Sensor systems; Transducers;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on
Print_ISBN :
0-7803-9482-8
DOI :
10.1109/MHS.2005.1589954
