• DocumentCode
    3187265
  • Title

    CNT based nano electro mechanical systems (NEMS)

  • Author

    Hierold, C. ; Stampfer, C. ; Helbling, T. ; Jungen, A. ; Tripp, M. ; Sarangi, D.

  • Author_Institution
    Dept. of Micro & Nanosyst., ETH Zurich, Switzerland
  • fYear
    2005
  • fDate
    7-9 Nov. 2005
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    The paper reports on the development of carbon nanotube based nano electromechanical sensors.
  • Keywords
    carbon nanotubes; microsensors; nanotechnology; carbon nanotube; electromechanical sensors; nanoelectromechanical systems; Biosensors; Carbon nanotubes; Mechanical factors; Mechanical sensors; Mechanical systems; Nanobioscience; Nanoelectromechanical systems; Semiconductivity; Sensor systems; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on
  • Print_ISBN
    0-7803-9482-8
  • Type

    conf

  • DOI
    10.1109/MHS.2005.1589954
  • Filename
    1589954