Fabrication and characterization of AFM probe with crystal-quartz tuning fork structure

Author

Hida, Hirotaka ; Shikida, Mitsuhiro ; Fukuzawa, Kenji ; Ono, Atsushi ; Sato, Kiminori ; Asaumi, K. ; Iriye, Y. ; Di Cheng ; Sato, Kiminori

Author_Institution

Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Japan

fYear

2005

fDate

7-9 Nov. 2005

Firstpage

97

Lastpage

101

Abstract

We have developed a new type of crystal quartz probe structure for application to the atomic force microscopy (AFM) system. Using quartz micromachining technology and a focused-ion-beam system, we fabricated a device in which we integrate tuning fork structure and a probe tip. We evaluated the vibration characteristic of the fabricated tuning fork by measuring its frequency response. From these results, we found that it would achieve subnanometer scale resolution in an AFM system.

Keywords

atomic force microscopy; instrumentation; micromachining; micromechanical devices; nanotechnology; quartz; atomic force microscopy system; crystal-quartz tuning fork structure; focused-ion-beam system; frequency response; quartz micromachining technology; subnanometer scale resolution; Atomic force microscopy; Atomic measurements; Electrodes; Fabrication; Optical tuning; Probes; Q factor; Resonant frequency; Springs; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on

Print_ISBN

0-7803-9482-8

Type

conf

DOI

10.1109/MHS.2005.1589970

Filename

1589970