Design and fabrication of pyrolyzed polymer micro and nano structures

This paper deals with pyrolyzed polymers as a kind of carbon materials obtained by a pyrolysis of polymers. A pyrolysis process is executed by a heat treatment in the absence of O₂. Various polymer materials utilized in MEMS are potential precursors of pyrolyzed polymers. Micromachining of polymers has allowed various polymer micro and nano structures. Polymer MEMS structures can be transformed into pyrolyzed polymer MEMS structures for various applications. This work focuses on design and fabrication of pyrolyzed polymer micro and nano structures through a combination of micromachining of polymers and following pyrolysis. Pyrolyzed polymer micro and nano bridge structures are fabricated for demonstrations. 100 nm wide bridge could be successfully fabricated as the fine free structure. Furthermore, pyrolyzed parylene-C micro pillar allay was realized as vertical free standing pyrolyzed polymer structures