Fabrication of all PDMS micro pump

This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the pneumatic force. The micropump consists of the three peristaltic-type actuators and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by silicon mold process and the two-step curing process for irreversible bonding of PDMS layers. The diameter and the thickness of the actuator diaphragm are 3 mm and 37 mum, respectively. The dynamic valve action of the cascade three actuators is confirmed by using video camera. The meniscus motion of the red-ink in the micro channel is also observed and its volume speed is estimated through the frame analysis of the recorded a video data. The square-wave input pressure of 37.5 kPa is applied to micro actuator for pumping test of the micro pump. The maximum tap-water suction volume speed from inlet port to micro pump is about 0.48 muL/sec at 0.3 Hz while the hydraulic pressure difference is 7 CmH₂O. Suction volume speed due to capillary effect is about 0.09 muL/sec. The maximum meniscus speed of red-ink is about 0.83 mm/sec at 5 Hz