Position measurement system for a microsystem

Author

Inoue, Toru ; Torii, Akihiro ; Doki, Kae ; Ueda, Akiteru

Author_Institution

Dept. of Electr. & Electron. Eng., Aichi Inst. of Technol., Toyota

fYear

2005

fDate

7-9 Nov. 2005

Firstpage

175

Lastpage

180

Abstract

A lot of miniature robots are developed, and various measurement methods for the miniature robot are proposed. Our research group proposed a position measurement system using position sensitive detectors (PSDs). The heart of the measurement method was lasers around the robot and the PSDs on the robot. However, the method is restricted in operation area by the length of the PSD. In this paper, we describe a position measurement system for a microsystem. The proposed system utilizes moving lasers, which are used as the moving landmarks. The principle of the measurement system and experimental results are described

Keywords

microrobots; microsensors; piezoelectric actuators; position control; position measurement; position sensitive particle detectors; microsystem; miniature robots; moving lasers; piezoelectric actuators; position measurement system; position sensitive detectors; Electrical resistance measurement; Electromagnetic measurements; Electromagnets; Mobile robots; Optical sensors; Position measurement; Position sensitive particle detectors; Robot kinematics; Robot sensing systems; Surface resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-9482-8

Type

conf

DOI

10.1109/MHS.2005.1589984

Filename

1589984