DocumentCode
3187899
Title
Optimization and characterizations of the dual axis gas gyroscope
Author
Dao, Dzung Viet ; Dau, Van Thanh ; Shiozawa, Tatsuo ; Kumagai, Hideo ; Sugiyama, Susumu
Author_Institution
Center for Promotion of the COE Program, Ritsumeikan Univ., Kyoto
fYear
2005
fDate
7-9 Nov. 2005
Firstpage
181
Lastpage
185
Abstract
This paper presents the optimization of the sensing element and characterizations of the dual axis gas gyroscope. Six different design of the sensing element were simulated to obtain higher sensitivity with lower power consumption. The influence of the arms structure to the thermal distribution along the thermistor was clarified. The working principle and the cross-sensitivity of the gas gyroscope are also analyzed. Experiments were performed to confirm the simulation results and good agreement has been realized. The sensor is expected to be applied in ship anti-rolling and stabilization systems
Keywords
gas sensors; gyroscopes; micromechanical devices; temperature sensors; thermistors; cross-sensitivity; dual axis gas gyroscope; sensing element; thermal distribution; thermistor; Damping; Electric shock; Fluid flow; Gas detectors; Gyroscopes; Orifices; Silicon; Thermal conductivity; Thermal resistance; Thermistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on
Conference_Location
Nagoya
Print_ISBN
0-7803-9482-8
Type
conf
DOI
10.1109/MHS.2005.1589985
Filename
1589985
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