Title :
Optimization and characterizations of the dual axis gas gyroscope
Author :
Dao, Dzung Viet ; Dau, Van Thanh ; Shiozawa, Tatsuo ; Kumagai, Hideo ; Sugiyama, Susumu
Author_Institution :
Center for Promotion of the COE Program, Ritsumeikan Univ., Kyoto
Abstract :
This paper presents the optimization of the sensing element and characterizations of the dual axis gas gyroscope. Six different design of the sensing element were simulated to obtain higher sensitivity with lower power consumption. The influence of the arms structure to the thermal distribution along the thermistor was clarified. The working principle and the cross-sensitivity of the gas gyroscope are also analyzed. Experiments were performed to confirm the simulation results and good agreement has been realized. The sensor is expected to be applied in ship anti-rolling and stabilization systems
Keywords :
gas sensors; gyroscopes; micromechanical devices; temperature sensors; thermistors; cross-sensitivity; dual axis gas gyroscope; sensing element; thermal distribution; thermistor; Damping; Electric shock; Fluid flow; Gas detectors; Gyroscopes; Orifices; Silicon; Thermal conductivity; Thermal resistance; Thermistors;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-9482-8
DOI :
10.1109/MHS.2005.1589985