• DocumentCode
    3187899
  • Title

    Optimization and characterizations of the dual axis gas gyroscope

  • Author

    Dao, Dzung Viet ; Dau, Van Thanh ; Shiozawa, Tatsuo ; Kumagai, Hideo ; Sugiyama, Susumu

  • Author_Institution
    Center for Promotion of the COE Program, Ritsumeikan Univ., Kyoto
  • fYear
    2005
  • fDate
    7-9 Nov. 2005
  • Firstpage
    181
  • Lastpage
    185
  • Abstract
    This paper presents the optimization of the sensing element and characterizations of the dual axis gas gyroscope. Six different design of the sensing element were simulated to obtain higher sensitivity with lower power consumption. The influence of the arms structure to the thermal distribution along the thermistor was clarified. The working principle and the cross-sensitivity of the gas gyroscope are also analyzed. Experiments were performed to confirm the simulation results and good agreement has been realized. The sensor is expected to be applied in ship anti-rolling and stabilization systems
  • Keywords
    gas sensors; gyroscopes; micromechanical devices; temperature sensors; thermistors; cross-sensitivity; dual axis gas gyroscope; sensing element; thermal distribution; thermistor; Damping; Electric shock; Fluid flow; Gas detectors; Gyroscopes; Orifices; Silicon; Thermal conductivity; Thermal resistance; Thermistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on
  • Conference_Location
    Nagoya
  • Print_ISBN
    0-7803-9482-8
  • Type

    conf

  • DOI
    10.1109/MHS.2005.1589985
  • Filename
    1589985