Title :
High-aspect-ratio nanofabrication using carbon nanotube probe in scanning tunneling microscope
Author :
Arima, Norikazu ; Matsumuro, Akihito
Keywords :
Atomic force microscopy; Carbon nanotubes; Fabrication; Gold; Manufacturing; Nanofabrication; Probes; Scanning electron microscopy; Tunneling; Voltage;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on
Print_ISBN :
0-7803-9482-8
DOI :
10.1109/MHS.2005.1589987
