DocumentCode
3187940
Title
High-aspect-ratio nanofabrication using carbon nanotube probe in scanning tunneling microscope
Author
Arima, Norikazu ; Matsumuro, Akihito
fYear
2005
fDate
7-9 Nov. 2005
Firstpage
175
Lastpage
180
Keywords
Atomic force microscopy; Carbon nanotubes; Fabrication; Gold; Manufacturing; Nanofabrication; Probes; Scanning electron microscopy; Tunneling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on
Print_ISBN
0-7803-9482-8
Type
conf
DOI
10.1109/MHS.2005.1589987
Filename
1589987
Link To Document