Title :
IEE Half-Day Colloquium on Computer Modelling Techniques for Microstructures (Ref. No.97/077)
Abstract :
The following topics were dealt with: integrated modelling techniques for micro-devices; computer modelling techniques for microstructures; coupled mechanical and electrostatic microactuator analysis; design simulation system; stress modelling
Keywords :
micromechanical devices; computer modelling techniques; coupled mechanical/electrostatic analysis; design simulation system; integrated modelling techniques; micro-devices; microactuator analysis; micromechanical structures; microstructures; stress modelling;
Conference_Titel :
Computer Modelling Techniques for Microstructures (Digest No: 1997/077), IEE Half-Day Colloquium on
Conference_Location :
London
