• DocumentCode
    3189000
  • Title

    Optimization of laser scribing for thin-film photovoltaics

  • Author

    Compaan, A.D. ; Matulionis, I. ; Miller, M.J. ; Jayamaha, U.N.

  • Author_Institution
    Dept. of Phys. & Astron., Toledo Univ., OH, USA
  • fYear
    1996
  • fDate
    13-17 May 1996
  • Firstpage
    769
  • Lastpage
    772
  • Abstract
    In this paper, the authors report on studies of four different lasers for the scribing of thin-film photovoltaic materials including CdTe, CIS, SnO2, ZnO, and Mo. They have used cw-lamp-pumped and flashlamp-pumped Nd:YAG lasers (λ=532/1064 nm), a copper-vapor laser (511/578 nm), and an XeCl-excimer laser (308 nm), with pulse durations ranging from 180 nsec down to 8 nsec. The purpose of this work is to identify the effects of laser wavelength and laser pulse duration on the most effective energy utilization and on the quality of the scribe line. Ablation spots and scribe lines were examined by optical microscopy and stylus profilometry. The ablation threshold has been identified for the combinations of four lasers and five materials. The energy density for optimum removal of material has been identified for two of the laser systems (three wavelengths)
  • Keywords
    laser beam etching; laser materials processing; semiconductor device testing; semiconductor thin films; solar cells; 180 to 8 ns; 308 nm; 511 to 578 nm; 532 to 1064 nm; CdTe; Cu; Cu-vapor laser; CuInSe2; Mo; Nd:YAG lasers; SnO2; XeCl; XeCl-excimer laser; YAG:Nd; YAl5O12:Nd; ZnO; energy density; energy utilization; laser pulse duration; laser scribing; laser wavelength; optical microscopy; optimum material removal; scribe line quality; semiconductor; stylus profilometry; thin-film photovoltaic materials; Laser ablation; Laser modes; Laser theory; Optical films; Optical materials; Optical microscopy; Optical pulses; Photovoltaic cells; Semiconductor lasers; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 1996., Conference Record of the Twenty Fifth IEEE
  • Conference_Location
    Washington, DC
  • ISSN
    0160-8371
  • Print_ISBN
    0-7803-3166-4
  • Type

    conf

  • DOI
    10.1109/PVSC.1996.564241
  • Filename
    564241