Title :
High resolution electron microscopy from imaging towards measuring
Author :
Van Aert, S. ; den Dekker, A.J. ; van den Bos, A. ; Van Dyck, D.
Author_Institution :
Dept. of Appl. Phys., Delft Univ. of Technol., Netherlands
Abstract :
High resolution electron microscopy is discussed as a measuring, rather than an imaging technique. It is shown that the interpretation of the images could greatly benefit from a quantitative instead of a qualitative approach accompanied by quantitative statistical experimental design
Keywords :
design of experiments; electron microscopy; image resolution; optimisation; parameter estimation; atom positions measurement; high resolution electron microscopy; measuring technique; parameter estimation; point resolution; precision based optimisation; quantitative model-based HREM; quantitative statistical experimental design; Atomic measurements; Design for experiments; Electron microscopy; High-resolution imaging; Image resolution; Instruments; Material properties; Nanostructured materials; Position measurement; Superconducting materials;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2001. IMTC 2001. Proceedings of the 18th IEEE
Conference_Location :
Budapest
Print_ISBN :
0-7803-6646-8
DOI :
10.1109/IMTC.2001.929564
