Numerical Simulations of MEMS Comb-Drive Using Coupled Mechanical and Electrostatic Analyses

Coupled domain mechanical and electrostatic analysis of MEMS Comb-Drive has been carried out in this study. Numerical simulations are performed using Finite Element Method for Mechanical Analysis and Boundary Element Method for Electrostatic Analysis. Various design parameters of a Comb-Drive like finger overlap, folded flexure spring length and applied voltage were considered and their effect on performance variables like capacitance, natural frequency and displacement of comb were studied using numerical simulations. Simulations were performed using a standard Comb-Drive with 30 movable fingers in the comb and folded flexure spring length varying from 200 μm to 350 μm. The results showed that the capacitance of the Comb-Drive increases with increasing finger-overlap whereas the finger-overlap increases by increasing driving voltage. A relationship between Comb-Drive displacement and the natural frequency of the structure with folded flexure spring length is also comprehensively covered in this study.