Title :
Improvement of near-field scanning optical microscope and observation of optical waveguide
Author :
Kim, Ki Hyun ; Lee, Byongho ; Jhe, Wonho
Author_Institution :
Dept. of Phys., Seoul Nat. Univ., South Korea
Abstract :
Optical near-fields are widely studied to overcome the diffraction limit of conventional optics. Near-field scanning optical microscopes (NSOM), one of the optical near-field instruments, was fabricated and improved. The shear force mechanism is used for the tip-sample distance control which is basic requirement in near-field applications. In this work, the detection mechanism and feedback control of shear force were improved by a fiber detection scheme and a digital feedback controller
Keywords :
optical feedback; optical fibres; optical microscopes; optical scanners; detection mechanism; diffraction limit; digital feedback controller; feedback control; fiber detection scheme; near-field applications; near-field scanning optical microscope; near-field scanning optical microscopes; optical near-field instrument; optical near-fields; optical waveguide; shear force mechanism; tip-sample distance control; Adaptive control; Etching; Force feedback; Instruments; Optical feedback; Optical fibers; Optical microscopy; Optical sensors; Optical waveguides; Scanning electron microscopy;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3895-2
DOI :
10.1109/LEOS.1997.645235
