Title :
Fast maskless fabrication of electrooptic polymer devices by simultaneous direct laser writing and electric poling of channel waveguides
Author :
Chen, Anto ; Chuyanov, Vadim ; Garner, Sean ; Steier, William H. ; Chen, Jinghong ; Ra, Younsoo ; Mao, Shan S H ; Guo, Lan ; Dalton, Larry R.
Author_Institution :
Dept. of Electr. Eng.-Electrophys., Univ. of Southern California, Los Angeles, CA, USA
Abstract :
The conventional process of fabricating electrooptic (EO) polymer waveguide devices involves electric poling to achieve noncentrosymmetric order and photomasks to define channel waveguides by reactive ion etching or photobleaching. However, these techniques are restricted to passive waveguides since the temperature involved destroys the EO effect by randomizing the poling order of active molecules. In this paper, we will demonstrate a novel but simple technique of simultaneous direct laser writing and electric poling of arbitrary channel waveguides that have EO properties. This technique can be very useful for the fast prototyping of active devices such as modulators and switches
Keywords :
dielectric polarisation; electro-optical modulation; electro-optical switches; laser beam applications; optical fabrication; optical polymers; optical waveguides; active molecules; arbitrary channel waveguides; channel waveguides; direct laser writing; electric poling; electro optical modulators; electro optical switches; electrooptic polymer devices; electrooptic polymer waveguide device fabrication; fast maskless fabrication; fast prototyping; noncentrosymmetric order; optical waveguides; simultaneous direct laser writing; Electrooptic devices; Electrooptic effects; Electrooptic modulators; Electrooptical waveguides; Etching; Fabrication; Photobleaching; Polymers; Temperature; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3895-2
DOI :
10.1109/LEOS.1997.645399