Title :
Integrated tunable VCSELs with simple MEMS technology
Author :
Kögel, B. ; Abbaszadehbanaeiyan, A. ; Westbergh, P. ; Haglund, Å ; Gustavsson, J. ; Bengtsson, J. ; Haglund, E. ; Frederiksen, H. ; Debernardi, P. ; Larsson, A.
Author_Institution :
Dept. of Microtechnol. & Nanosci. (MC2), Chalmers Univ. of Technol., Göteborg, Sweden
Abstract :
A simple MEMS technology for wafer-scale fabrication of tunable VCSELs is presented. Reflown photo-resist droplets serve as preform for making curved movable micro-mirrors. First devices show a tuning range of 15 nm with mW-output power.
Keywords :
micromirrors; photoresists; surface emitting lasers; wafer-scale integration; MEMS technology; integrated tunable VCSEL; micromirrors; reflown photo-resist droplets; wafer-scale fabrication; Apertures; Distributed Bragg reflectors; Micromechanical devices; Resists; Tuning; Vertical cavity surface emitting lasers;
Conference_Titel :
Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International
Conference_Location :
Kyoto
Print_ISBN :
978-1-4244-5683-3
DOI :
10.1109/ISLC.2010.5642636
