DocumentCode
3193585
Title
An Axially Symetric Finite Element Modelling For The Electromagnetic Behavior in an Rf Plasma Device
Author
Mekideche, M.R. ; Feliachi, M.
Author_Institution
L. R. T. I/ I.u. T B. P. 420 44606 Saint-Nazaire Cedex France
fYear
1993
fDate
13-16 April 1993
Keywords
Coils; Conductivity; Electromagnetic devices; Electromagnetic modeling; Finite element methods; Plasma applications; Plasma density; Plasma devices; Plasma temperature; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1993. INTERMAG '93., Digest of International
Conference_Location
Stockhom, Sweden
Print_ISBN
0-7803-1310-0
Type
conf
DOI
10.1109/INTMAG.1993.642758
Filename
642758
Link To Document