Title :
Properties Of Diamond-like Carbon Films And Its Application For Protective Layers Of Thin Film Magnetic Recording Disks
Author :
Kokaku, Y. ; Matsumoto, M. ; lnaba, H. ; Fujimaki, S. ; Abei, K. ; Kitoh, M.
Author_Institution :
Hitachi Ltd.,
Keywords :
Diamond-like carbon; Internal stresses; Magnetic films; Magnetic recording; Mechanical factors; Plasma properties; Protection; Substrates; Testing; Transistors;
Conference_Titel :
Magnetics Conference, 1993. INTERMAG '93., Digest of International
Conference_Location :
Stockhom, Sweden
Print_ISBN :
0-7803-1310-0
DOI :
10.1109/INTMAG.1993.642772