Design and implementation of a high-voltage high-frequency pulse power generation system for plasma applications

Author

Tsai, M.T. ; Ke, C.W.

Author_Institution

Dept. of Electr. Eng., Southern Taiwan Univ., Tainan, Taiwan

fYear

2009

fDate

2-5 Nov. 2009

Firstpage

1556

Lastpage

1560

Abstract

This paper presents a high-voltage high-frequency inverter for atmosphere plasma applications. The proposed system is consisted of a PFC rectifier, a voltage-source full-bridge inverter with phase-shift control, a high-voltage high-frequency transformer, and a plasma reactor. The mathematical models including the inverter and the plasma reactor have been described. The PFC rectifier is achieved by UC3854 based controller, and UC 3895 plus PIC16F877 microcontroller are applying to the inverter. Experimental results show the features of the PWM and PDM control strategies in accordance with the applications.

Keywords

high-frequency transformers; plasma applications; plasma sources; pulsed power supplies; rectifying circuits; PDM control; PFC rectifier; PIC16F877 microcontroller; PWM control; UC 3895; UC3854 based controller; atmosphere plasma applications; high voltage high frequency inverter; high voltage high frequency pulse power generation system; high-voltage high-frequency transformer; phase-shift control; plasma generation; plasma reactor; pulse-density modulation; pulse-width modulation; voltage source full bridge inverter; Atmosphere; Control systems; Inductors; Plasma applications; Power generation; Pulse transformers; Pulse width modulation; Pulse width modulation inverters; Rectifiers; Voltage control; atmosphere plasma; high-frequency; phase-shift control;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Electronics and Drive Systems, 2009. PEDS 2009. International Conference on

Conference_Location

Taipei

Print_ISBN

978-1-4244-4166-2

Electronic_ISBN

978-1-4244-4167-9

Type

conf

DOI

10.1109/PEDS.2009.5385843

Filename

5385843