Title :
Instrumentation and methodology for MEMS testing, reliability assessment and failure analysis
Author_Institution :
Mirosystems Dept., IMEC, Leuven, Belgium
Abstract :
In this paper some instrumentation and methodology for testing, reliability assessment and failure analysis of MEMS is discussed. Well-known instruments such as atomic force microscopy and scanning electron microscopy are mentioned, but the main focus is on specific MEMS instrumentation.
Keywords :
atomic force microscopy; micromechanical devices; scanning electron microscopy; semiconductor device packaging; semiconductor device reliability; semiconductor device testing; MEMS testing; atomic force microscopy; failure analysis; reliability assessment; scanning electron microscopy; Atomic force microscopy; Failure analysis; Frequency; Instruments; Micromechanical devices; Packaging; Radiofrequency microelectromechanical systems; Switches; Testing; Voltage;
Conference_Titel :
Microelectronics, 2004. 24th International Conference on
Print_ISBN :
0-7803-8166-1
DOI :
10.1109/ICMEL.2004.1314558
