Title :
Mesa diaphragm-based Fabry-Perot optical MEMS pressure sensor
Author :
Ge, Yi-Xian ; Wang, Ming ; Yan, IIai-Tao
Author_Institution :
Jiangsu Key Lab. of Opto-Electron. Technol., Nanjing Normal Univ., Nanjing, China
Abstract :
An optical MEMS pressure sensor with a mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Perot (F-P) interference and the relation between deflection and pressure is analyzed. Both the mechanical model of the mesa structure diaphragm and the signal averaging effect is validated by simulation, which declares that the mesa structure diaphragm is superior to the planar one on the parallelism and can reduce the signal averaging effect. Experimental results demonstrate that the mesa structure sensor has a reasonable linearity and sensitivity.
Keywords :
Fabry-Perot interferometers; fibre optic sensors; microsensors; pressure sensors; Fabry-Perot interference; Fabry-Perot optical MEMS pressure sensor; mesa membrane; Biomembranes; Fabry-Perot; Interference; Mechanical sensors; Micromechanical devices; Mirrors; Optical fiber sensors; Optical fibers; Optical sensors; Silicon; F-P interference; MEMS; Optical fiber sensor; mesa structure; parallelism;
Conference_Titel :
Optical Fiber Sensors Conference, 2008. APOS '08. 1st Asia-Pacific
Conference_Location :
Chengdu
Print_ISBN :
978-1-4244-2131-2
Electronic_ISBN :
978-1-4244-2132-9
DOI :
10.1109/APOS.2008.5226325
