Title :
A novel approach to embed off-chip RF passives in PCB based on thin film technology
Author :
Wang, Liang ; Christiaens, Wim ; Brebels, Steven ; De Raedt, Walter ; Vanfleteren, Jan
Author_Institution :
CMST, IMEC, Ghent, Belgium
Abstract :
Embedding passive components (EPCs) is known as a promising technology to provide high electrical performance and to reduce fabrication cost. This paper describes a novel approach to embed off-chip RF passives based on thin film stack. Multilayer structures are built-up on temporary glass carrier substrates by repetitive application of spin-coated polyimide layers and sputtered metal layers. After processing and testing the structures can easily be released from the carrier and embedded inside PCB or FCB (flexible PCB).
Keywords :
UHF filters; chromium alloys; copper alloys; flexible electronics; low-pass filters; metals; microwave filters; multilayers; nickel alloys; passive networks; polymers; printed circuits; sputtered coatings; thin film inductors; thin film resistors; titanium alloys; tungsten alloys; NiCr-Cu-TiW; SiO2-Jk; embedded passive components; flexible PCB; multilayer structures; off-chip RF passives; spin-coated polyimide layers; sputtered metal layers; temporary glass carrier substrates; thin film stack; Inductors; Metals; Nonhomogeneous media; Polyimides; Radio frequency; Resistors; Spirals;
Conference_Titel :
Electronic System-Integration Technology Conference (ESTC), 2010 3rd
Conference_Location :
Berlin
Print_ISBN :
978-1-4244-8553-6
Electronic_ISBN :
978-1-4244-8554-3
DOI :
10.1109/ESTC.2010.5642905