• DocumentCode
    3199648
  • Title

    Reducing Atomic Force Microscope Tip Deflection using Command Shaping

  • Author

    Elsberry, Allan H. ; Robertson, Michael J.

  • Author_Institution
    United States Naval Acad., Annapolis
  • fYear
    2008
  • fDate
    16-18 March 2008
  • Firstpage
    319
  • Lastpage
    323
  • Abstract
    Dynamic atomic force microscopy (AFM) is a popular scanning method that utilizes an oscillating cantilever tip to interact with and develop high resolution images of surfaces. Though this method is one of the most versatile in AFM, it is dependent upon maintaining constant oscillation amplitude. Constant oscillation amplitude can be difficult to achieve when probe movement is necessary to maintain an appropriate tip to sample distance. This paper documents the effectiveness of command shaping techniques in reducing the probe´s tip deflection during the scanning process. Command shapers are used to modify the movements of the scanning probe base in response to changes in the sample´s surface. Reducing tip deflection and tip tracking error improve the quality of the scanned image while reducing the likelihood of damage to the sample or the probe.
  • Keywords
    atomic force microscopy; cantilevers; image resolution; atomic force microscope tip deflection; cantilever tip oscillation; command shaping; constant oscillation amplitude; probe movement; scanning method; surface high resolution images; Atomic force microscopy; Feedback control; Force control; Force feedback; Force measurement; Image resolution; Probes; Scanning electron microscopy; Transmission electron microscopy; Weapons;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    System Theory, 2008. SSST 2008. 40th Southeastern Symposium on
  • Conference_Location
    New Orleans, LA
  • ISSN
    0094-2898
  • Print_ISBN
    978-1-4244-1806-0
  • Electronic_ISBN
    0094-2898
  • Type

    conf

  • DOI
    10.1109/SSST.2008.4480246
  • Filename
    4480246