DocumentCode
3199648
Title
Reducing Atomic Force Microscope Tip Deflection using Command Shaping
Author
Elsberry, Allan H. ; Robertson, Michael J.
Author_Institution
United States Naval Acad., Annapolis
fYear
2008
fDate
16-18 March 2008
Firstpage
319
Lastpage
323
Abstract
Dynamic atomic force microscopy (AFM) is a popular scanning method that utilizes an oscillating cantilever tip to interact with and develop high resolution images of surfaces. Though this method is one of the most versatile in AFM, it is dependent upon maintaining constant oscillation amplitude. Constant oscillation amplitude can be difficult to achieve when probe movement is necessary to maintain an appropriate tip to sample distance. This paper documents the effectiveness of command shaping techniques in reducing the probe´s tip deflection during the scanning process. Command shapers are used to modify the movements of the scanning probe base in response to changes in the sample´s surface. Reducing tip deflection and tip tracking error improve the quality of the scanned image while reducing the likelihood of damage to the sample or the probe.
Keywords
atomic force microscopy; cantilevers; image resolution; atomic force microscope tip deflection; cantilever tip oscillation; command shaping; constant oscillation amplitude; probe movement; scanning method; surface high resolution images; Atomic force microscopy; Feedback control; Force control; Force feedback; Force measurement; Image resolution; Probes; Scanning electron microscopy; Transmission electron microscopy; Weapons;
fLanguage
English
Publisher
ieee
Conference_Titel
System Theory, 2008. SSST 2008. 40th Southeastern Symposium on
Conference_Location
New Orleans, LA
ISSN
0094-2898
Print_ISBN
978-1-4244-1806-0
Electronic_ISBN
0094-2898
Type
conf
DOI
10.1109/SSST.2008.4480246
Filename
4480246
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