DocumentCode :
3202408
Title :
The special software package for the electron energy spectrum study of semiconductors
Author :
Kalganov, V.D. ; Mileshkina, N.V. ; Sapronov, S.A. ; Ostroumova, E.V. ; Rogacheva, E.A.
Author_Institution :
V.A.Fock Inst. of Phys., St.Petersburg State Univ., Petrodvorets, Russia
Volume :
2
fYear :
2004
fDate :
16-19 May 2004
Firstpage :
495
Abstract :
Special software package named FEESA was developed for the multipurpose electronic measurement system, based on the field electron energy analyzer. FEESA tests both the spectrometer control system and the measuring electric circuit to check for a possible circuit break and its location. The field emission current as a function of the total voltage applied between the cold cathode and the anode - the I-V characteristics was measured. The probe hole technique was used to study emission from different parts of the emitting surface. The software package was created for the "electron spectrometer -computer" interface that provides the range of analyzed energies of the field-emission electrons up to 12 eV below the vacuum level with the scan step from 20 meV and the step time about 10-6 s for anode voltage in a range of 100V - 4000V.
Keywords :
electron field emission; semiconductor device models; semiconductor device testing; FEESA; circuit break; electron energy spectrum; field electron energy analyzer; field emission current; multipurpose electronic measurement system; probe hole technique; semiconductors; special software package; spectrometer control system; total voltage; Anodes; Circuit testing; Control systems; Electrons; Energy measurement; Software measurement; Software packages; Spectroscopy; System testing; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronics, 2004. 24th International Conference on
Print_ISBN :
0-7803-8166-1
Type :
conf
DOI :
10.1109/ICMEL.2004.1314871
Filename :
1314871
Link To Document :
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