Potentiality of LTCC for sensor applications

Author

Pietriková, Alena

Author_Institution

Dept. of Hybrid Microelectron., Kosice Univ. of Technol., Slovakia

fYear

2001

fDate

2001

Firstpage

112

Lastpage

116

Abstract

The potential of low temperature cofired ceramic (LTCC) multilayer technology allows realization of different structures for sensor applications. Examples of sensors realised at the Department of Hybrid Microelectronics in the Faculty of Electrical Engineering and Informatics at the Technical University in Kosice have shown the potential and development possibilities of LTCC for a wide field of thick film sensor applications. Other sensor applications were realized on a special shaped body based on LTCC multilayers

Keywords

biomedical electronics; biomedical measurement; ceramic packaging; electric sensing devices; gas sensors; hybrid integrated circuits; pressure sensors; thick film devices; vacuum measurement; LTCC; LTCC multilayer technology; LTCC multilayers; gas sensors; hybrid microelectronics; low temperature cofired ceramic multilayer technology; medical pressure sensors; pressure sensors; sensor applications; sensor structures; thick film sensor applications; vacuum sensors; Bridge circuits; Ceramics; Gas detectors; Microelectronics; Nonhomogeneous media; Pressure measurement; Resistors; Sensor phenomena and characterization; Temperature sensors; Thick film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology: Concurrent Engineering in Electronic Packaging, 2001. 24th International Spring Seminar on

Conference_Location

Calimanesti-Caciulata

Print_ISBN

0-7803-7111-9

Type

conf

DOI

10.1109/ISSE.2001.931025

Filename

931025