Title :
Optical activity and population inversion of Er doped in silicon-rich silicon nitride
Author :
Chang, Jee Soo ; Kim, Inyong ; Sung, Gun Yong ; Shin, Jung H.
Author_Institution :
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
Abstract :
Optical activity and population inversion of Er doped in silicon-rich silicon nitride (SRSN) is investigated. Transmission measurements of SRSN waveguide shows that nearly all of doped Er is optically active even after high temperature anneals.
Keywords :
annealing; erbium; light transmission; optical materials; optical waveguides; population inversion; silicon compounds; SiN:Er; optical activity; population inversion; transmission measurement; Absorption; Erbium; Optical pumping; Optical sensors; Optical variables control; Optical waveguides; Silicon;
Conference_Titel :
Group IV Photonics (GFP), 2010 7th IEEE International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-6344-2
DOI :
10.1109/GROUP4.2010.5643348
