Title :
Birefringence characterization on SOI waveguide using optical low coherence interferometry
Author :
Hsu, Shih-Hsiang ; Tseng, Sheng-Chieh ; You, Hui-Zhi
Author_Institution :
Dept. of Electron. Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei, Taiwan
Abstract :
An optical low-coherence interferometry was utilized to characterize the birefringence on 5-μm thick silicon-on-insulator waveguides. The SMF-28 fiber was taken as a baseline to demonstrate 2.6×10-3 waveguide birefringence with 5-μm width and 2.5-μm etch depth.
Keywords :
birefringence; light interferometry; optical waveguides; silicon-on-insulator; SMF-28 fiber; SOI waveguide; birefringence characterization; optical low coherence interferometry; silicon-on-insulator waveguide; size 2.5 mum; size 5 mum; waveguide birefringence; Optical fiber sensors; Optical fibers; Optical interferometry; Optical polarization; Birefringence; Coherence interferometry; Effective index; Optical waveguides;
Conference_Titel :
Group IV Photonics (GFP), 2010 7th IEEE International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-6344-2
DOI :
10.1109/GROUP4.2010.5643365
