Characterization algorithm for segmented MEMS mirrors

Author

Soehnel, Grant ; Bagwell, Brett ; Wick, David ; Cowan, William

Author_Institution

Sandia Nat. Labs., Albuquerque, NM

fYear

2009

fDate

7-14 March 2009

Firstpage

1

Lastpage

7

Abstract

Segmented MEMS mirrors have the potential to revolutionize optical designs for imaging and beam directing systems. Foveated imaging, adaptive optical zoom, and enhanced multi-spectral capability have already been demonstrated at Sandia National Laboratories using MEMS elements. The high stroke and individual segment control with piston and 2-directional tilt is very attractive for these and other applications. To address the challenge of characterizing segmented MEMS mirrors, a novel closed loop optimization algorithm has been developed to drive the mirrors to a desired shape utilizing feedback from a WYKO interferometer. This method has proved to produce more accurate results than previous attempts to drive the mirror with an open loop model.

Keywords

adaptive optics; closed loop systems; micro-optomechanical devices; micromirrors; optical control; position control; adaptive optical zoom; beam directing systems; enhanced multispectral capability; foveated imaging; segmented MEMS mirrors; Adaptive optics; Adaptive systems; Image segmentation; Laboratories; Micromechanical devices; Mirrors; Optical design; Optical feedback; Optical imaging; Optical interferometry; Closed-Loop Characterization; Hexagonal Array; MEMS Mirrors; Piston/Tip/Tilt;

fLanguage

English

Publisher

ieee

Conference_Titel

Aerospace conference, 2009 IEEE

Conference_Location

Big Sky, MT

Print_ISBN

978-1-4244-2621-8

Electronic_ISBN

978-1-4244-2622-5

Type

conf

DOI

10.1109/AERO.2009.4839445

Filename

4839445