Title :
High-speed SOI microring modulator integrated with grating couplers
Author :
Xiao, Xi ; Xu, Haihua ; Zhu, Yu ; Zhou, Liang ; Hu, Yingtao ; Fan, Zhongchao ; Li, Yuntao ; Li, Zhiyong ; Yu, Yude ; Yu, Jinzhong
Author_Institution :
State Key Lab. on Integrated Optoelectron., Chinese Acad. of Sci., Beijing, China
Abstract :
We demonstrate a high-speed SOI microring modulator integrated with grating couplers. Wafer-level measurements were set up for the device characterizations. 60 nm 3-dB coupling bandwidth and 10 Gb/s NRZ modulation are finally realized.
Keywords :
diffraction gratings; integrated optics; optical couplers; optical modulation; silicon-on-insulator; NRZ modulation; Si; bit rate 10 Gbit/s; device characterizations; grating couplers; high-speed SOI microring modulator; size 60 nm; wafer-level measurements; Couplers; Couplings; Gratings; Modulation; Optical fiber couplers; Optical variables measurement; Semiconductor device measurement; grating coupler; microring resonator; silicon modulator;
Conference_Titel :
Group IV Photonics (GFP), 2010 7th IEEE International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-6344-2
DOI :
10.1109/GROUP4.2010.5643413
