Title :
Bulk silicon photonic wire for one-chip integrated optical interconnection
Author :
Ji, Ho-Chul ; Ha, K.H. ; Na, K.W. ; Kim, S.G. ; Joe, I.S. ; Shin, D.J. ; Lee, K.H. ; Suh, S.D. ; Bok, J.K. ; You, Y.S. ; Hyung, Y.W. ; Kim, S.S. ; Park, Y.D. ; Chung, C.H.
Author_Institution :
Semicond. R&D Center, Samsung Electron., Yongin, South Korea
Abstract :
We report a nano-sized silicon waveguide by forming partial silicon-on-insulator structure with SPE on bulk silicon substrate. The propagation loss is as low as 6.1 dB/cm, which is close to that of silicon-on-insulator based waveguide.
Keywords :
elemental semiconductors; integrated optics; integrated optoelectronics; optical interconnections; optical losses; optical waveguides; silicon; silicon-on-insulator; Si; bulk silicon photonic wire; nanosized waveguide; one-chip integrated optical interconnection; propagation loss; silicon photonics; silicon-on-insulator; Crystals; Loss measurement; Optical waveguides; Photonics; Propagation losses; Silicon; Substrates; nano-wire; optical interconnect; photonic wire; silicon photonics; silicon waveguide; silicon-on-insulator (SOI);
Conference_Titel :
Group IV Photonics (GFP), 2010 7th IEEE International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-6344-2
DOI :
10.1109/GROUP4.2010.5643414
