• DocumentCode
    3204082
  • Title

    Bulk silicon photonic wire for one-chip integrated optical interconnection

  • Author

    Ji, Ho-Chul ; Ha, K.H. ; Na, K.W. ; Kim, S.G. ; Joe, I.S. ; Shin, D.J. ; Lee, K.H. ; Suh, S.D. ; Bok, J.K. ; You, Y.S. ; Hyung, Y.W. ; Kim, S.S. ; Park, Y.D. ; Chung, C.H.

  • Author_Institution
    Semicond. R&D Center, Samsung Electron., Yongin, South Korea
  • fYear
    2010
  • fDate
    1-3 Sept. 2010
  • Firstpage
    96
  • Lastpage
    98
  • Abstract
    We report a nano-sized silicon waveguide by forming partial silicon-on-insulator structure with SPE on bulk silicon substrate. The propagation loss is as low as 6.1 dB/cm, which is close to that of silicon-on-insulator based waveguide.
  • Keywords
    elemental semiconductors; integrated optics; integrated optoelectronics; optical interconnections; optical losses; optical waveguides; silicon; silicon-on-insulator; Si; bulk silicon photonic wire; nanosized waveguide; one-chip integrated optical interconnection; propagation loss; silicon photonics; silicon-on-insulator; Crystals; Loss measurement; Optical waveguides; Photonics; Propagation losses; Silicon; Substrates; nano-wire; optical interconnect; photonic wire; silicon photonics; silicon waveguide; silicon-on-insulator (SOI);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2010 7th IEEE International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-6344-2
  • Type

    conf

  • DOI
    10.1109/GROUP4.2010.5643414
  • Filename
    5643414
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3204082