3205970

New Insulator Film Of Integrated Capacitor For Silicon Strip Detector

Okuno, S. ; Ikeda, H. ; Akamine, T. ; Saitoh, Y. ; Yamanaka, J. ; Miyahara, S. ; Ishihara, Y. ; Takeuchi, H. ; Mandai, M. ; Kanazawa, H. ; Kojima, Y. ; Kamiya, M. ; Fujita, Y. ; Higashi, Y. ; Ikeda, M. ; Koike, S. ; Matsuda, T. ; Ozaki, H. ; Tanaka, M. ;

The Graduate University for Advanced Studies

1993

31 Oct-6 Nov 1993

48

52

Capacitance; Capacitors; Dielectrics and electrical insulation; Gas detectors; Laboratories; Physics; Semiconductor films; Silicon compounds; Strips; Voltage;

English

ieee

Nuclear Science Symposium and Medical Imaging Conference, 1993., 1993 IEEE Conference Record.

0-7803-1487-5

conf

10.1109/NSSMIC.1993.701650

701650