• DocumentCode
    3208175
  • Title

    Study and application of magnetic bubble manufacturing equipment

  • Author

    Yu, Weijun

  • Author_Institution
    Sch. of Yanling, CZU, Changzhou, China
  • Volume
    1
  • fYear
    2011
  • fDate
    29-31 July 2011
  • Abstract
    In this paper, we have discussed the manufacturing process of magnetic bubble device which including magnetic bubble storage and semiconductor integrated circuit manufacturing technology, especially the method about how to make magnetic bubble uropatagia. We have taken GGG uropatagia for example, and have studied garnet magnetic single crystal film´s growing, evaporating, photoetching, flaking and assembling. By studying magnetic bubble´s performance, we have discussed the application of magnetic bubble devices.
  • Keywords
    integrated circuit manufacture; magnetic bubble devices; production equipment; storage; GGG uropatagia; device manufacturing process; film assembling; film evaporation; film flaking; film growth; film photoetching; gadolinium gallium garnet; garnet magnetic single crystal film; magnetic bubble device; magnetic bubble manufacturing equipment; magnetic bubble storage; magnetic bubble uropatagia; semiconductor integrated circuit manufacturing technology; Magnetic devices; Magnetic domains; Magnetic films; Magnetic resonance imaging; Performance evaluation; Semiconductor device measurement; Epitaxial masking; Magnetic bubble; Magnetic film; Storage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics and Optoelectronics (ICEOE), 2011 International Conference on
  • Conference_Location
    Dalian
  • Print_ISBN
    978-1-61284-275-2
  • Type

    conf

  • DOI
    10.1109/ICEOE.2011.6013083
  • Filename
    6013083