DocumentCode
3208175
Title
Study and application of magnetic bubble manufacturing equipment
Author
Yu, Weijun
Author_Institution
Sch. of Yanling, CZU, Changzhou, China
Volume
1
fYear
2011
fDate
29-31 July 2011
Abstract
In this paper, we have discussed the manufacturing process of magnetic bubble device which including magnetic bubble storage and semiconductor integrated circuit manufacturing technology, especially the method about how to make magnetic bubble uropatagia. We have taken GGG uropatagia for example, and have studied garnet magnetic single crystal film´s growing, evaporating, photoetching, flaking and assembling. By studying magnetic bubble´s performance, we have discussed the application of magnetic bubble devices.
Keywords
integrated circuit manufacture; magnetic bubble devices; production equipment; storage; GGG uropatagia; device manufacturing process; film assembling; film evaporation; film flaking; film growth; film photoetching; gadolinium gallium garnet; garnet magnetic single crystal film; magnetic bubble device; magnetic bubble manufacturing equipment; magnetic bubble storage; magnetic bubble uropatagia; semiconductor integrated circuit manufacturing technology; Magnetic devices; Magnetic domains; Magnetic films; Magnetic resonance imaging; Performance evaluation; Semiconductor device measurement; Epitaxial masking; Magnetic bubble; Magnetic film; Storage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics and Optoelectronics (ICEOE), 2011 International Conference on
Conference_Location
Dalian
Print_ISBN
978-1-61284-275-2
Type
conf
DOI
10.1109/ICEOE.2011.6013083
Filename
6013083
Link To Document