Title :
Development of high spatial resolution x-ray radiography system equipped with multiwalled carbon nanotube field emission cathode
Author :
Yabushita, Ryosuke ; Hata, Koichi
Author_Institution :
Mie Univ., Tsu
Abstract :
In this paper, newly developed high spatial resolution X-ray radiography system (HR-XRS) by modifying the compact SEM equipped with the MWCNT cathode former was reported. The X-ray images of the Cu 300 mesh were taken as a demonstration of the XRS. The resolution less than 1 mum was achieved. It is suggested that the MWCNT cathode is suitable one for the HR-XRS.
Keywords :
X-ray imaging; carbon nanotubes; cathodes; copper; electron field emission; image resolution; nondestructive testing; radiography; scanning electron microscopy; C; Cu; HR-XRS; MWCNT cathode; SEM; field emission cathode; high-spatial resolution X-ray radiography system; multiwalled carbon nanotube; Carbon nanotubes; Cathodes; Electron beams; Lenses; Radiography; Scanning electron microscopy; Spatial resolution; Tungsten; X-ray diffraction; X-ray imaging;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-1133-7
Electronic_ISBN :
978-1-4244-1134-4
DOI :
10.1109/IVNC.2007.4480931
