Title :
Design, fabrication and characterization of double-gated vertically aligned carbon nanofiber field emitter arrays
Author :
Chen, L.-Y. ; Velásquez-García, L.F. ; Wang, X. ; Cheung, K. ; Teo, K. ; Akinwande, A.I.
Author_Institution :
Massachusetts Inst. of Technol., Cambridge
Abstract :
In this work, we designed and fabricated two types of double-gated isolated vertically aligned carbon nanofiber field emission arrays (VACNF FEAs) to study how the tip position relative to the gate affects the device performance. In the first type, the tip is in-plane with the gate, and in the second type, the tip is 0.9 mum below the gate. To quantify the effectiveness of the two gates to affect the total emission current, the gate field factor (betaG) and the focus field factor (betaF) are examined for both types of VACNF FEAs experimentally and by simulation.
Keywords :
carbon; field emitter arrays; nanoelectronics; nanostructured materials; nanotechnology; C; VACNF FEA fabrication; double-gated vertically aligned carbon nanofiber; field emission array design; focus field factor; gate field factor; total emission current; Anodes; Carbon dioxide; Collimators; Electron beams; Electron emission; Fabrication; Field emitter arrays; Lithography; Planarization; Voltage;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-1133-7
Electronic_ISBN :
978-1-4244-1134-4
DOI :
10.1109/IVNC.2007.4480942