• DocumentCode
    3210060
  • Title

    Design, fabrication and characterization of double-gated vertically aligned carbon nanofiber field emitter arrays

  • Author

    Chen, L.-Y. ; Velásquez-García, L.F. ; Wang, X. ; Cheung, K. ; Teo, K. ; Akinwande, A.I.

  • Author_Institution
    Massachusetts Inst. of Technol., Cambridge
  • fYear
    2007
  • fDate
    8-12 July 2007
  • Firstpage
    82
  • Lastpage
    83
  • Abstract
    In this work, we designed and fabricated two types of double-gated isolated vertically aligned carbon nanofiber field emission arrays (VACNF FEAs) to study how the tip position relative to the gate affects the device performance. In the first type, the tip is in-plane with the gate, and in the second type, the tip is 0.9 mum below the gate. To quantify the effectiveness of the two gates to affect the total emission current, the gate field factor (betaG) and the focus field factor (betaF) are examined for both types of VACNF FEAs experimentally and by simulation.
  • Keywords
    carbon; field emitter arrays; nanoelectronics; nanostructured materials; nanotechnology; C; VACNF FEA fabrication; double-gated vertically aligned carbon nanofiber; field emission array design; focus field factor; gate field factor; total emission current; Anodes; Carbon dioxide; Collimators; Electron beams; Electron emission; Fabrication; Field emitter arrays; Lithography; Planarization; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
  • Conference_Location
    Chicago, IL
  • Print_ISBN
    978-1-4244-1133-7
  • Electronic_ISBN
    978-1-4244-1134-4
  • Type

    conf

  • DOI
    10.1109/IVNC.2007.4480942
  • Filename
    4480942